Facility

TOK TAJRC Advanced Resist R&D Center (Tama, Tokyo)

Tokyo Ohka Kogyo's TAJRC (Tama Advanced Research Joint Center) in Tama, Tokyo is a next-generation photoresist development laboratory focused on High-NA EUV resist chemistries and metal-oxide resist alternatives to JSR/Inpria's tin-oxide platform. TAJRC represents TOK's strategic effort to develop competitive next-generation resists before High-NA EUV reaches volume production. The center is a joint research initiative with semiconductor fab partners. Source: https://www.tok.co.jp/eng/ir/