Facility

Carl Zeiss SMT Optics Plant (Oberkochen)

Carl Zeiss SMT primary EUV optics manufacturing in Oberkochen, Baden-Württemberg — same town as Carl Zeiss AG headquarters. Produces all EUV-grade mirrors and optical systems for ASML scanners: collector mirrors, illuminators, projection optics. Each mirror: 50+ Mo/Si bilayer pairs, 50 picometer surface tolerance, months of manufacturing time. Zero substitute supplier exists globally. ASML invested €1B in Zeiss (2016) plus €220M R&D + €540M capex over 6 years. Source: https://www.zeiss.com/semiconductor-manufacturing-technology/news-and-events/smt-press-releases/2025/euv-30-years.html