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Entegris, Inc.
U.S. specialty materials company (Nasdaq: ENTG, HQ Billerica, MA); leading supplier of CMP slurries, chemical delivery systems, and contamination control for semiconductor fabs. Products: copper/barrier CMP slurries, ultra-hard material polishing (SiC, GaN, diamond), post-CMP cleaners, filtration and purification systems. Acquired Sinmat (CMP slurry specialist). Key partner for leading-edge fab process integration. ~3-5% of semiconductor specialty chemicals by value.
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CMP Slurries & Abrasives
35%Chemical Filtration & Purification
30%Chemical Delivery & Materials Handling
20%Advanced Materials & Coatings
15%
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Did you know2023
Entegris CMP slurries are used at both ends of the semiconductor technology spectrum: at the leading edge of logic (polishing copper interconnects and barrier metals in 3nm and 2nm AI chips) and in power electronics (polishing SiC and GaN wafers for EV inverters, solar inverters, and 5G RF components). The AI chip supply chain and the clean energy transition supply chain share the same Entegris slurry chemistry expertise. An Entegris supply disruption -- from a raw material shortage (CMP abrasive particles, typically alumina, ceria, or silica), a product quality hold, or a facility incident at Billerica -- would simultaneously delay advanced logic chip production at TSMC and Intel AND delay SiC power device production for EV inverter supply chains. The semiconductor industry and the EV industry share a specialty chemical supplier that most procurement teams in either industry do not identify as a cross-sector exposure.
Entegris, Inc. ↗Origin2023
Entegris was formed through the 2005 merger of Mykrolis Corporation and Entegris Inc. (previously Fluoroware), both specialty materials companies serving semiconductor contamination control. Mykrolis was spun from Millipore (the laboratory filtration company that was itself acquired by Merck KGaA in 2010). The Entegris/Fluoroware heritage traced to fluoropolymer component manufacturing for cleanroom semiconductor handling -- wafer carriers, chemical containers, and PTFE-lined process equipment. The 2022 acquisition of CMC Materials (CMP slurry and diamond polishing specialist) for $4.9 billion doubled Entegris's CMP slurry market position and added SiC and GaN polishing capabilities critical for power electronics and RF device manufacturing. Entegris' Billerica, Massachusetts headquarters is in the Greater Boston semiconductor and biotech corridor -- the same geography as Analog Devices, MACOM, and MIT Lincoln Laboratory -- giving it proximity to US semiconductor and defense electronics customers.
Entegris, Inc. ↗