Facility

ASML San Diego / Cymer (Light Source)

Cymer division (acquired by ASML 2013 for €1.95B) in San Diego. Manufactures and services the laser-produced plasma (LPP) EUV light source: molten tin droplets at 70 m/s, 50,000/second, struck by Trumpf CO₂ laser pulses to generate 13.5nm EUV light. Three development sources on-site for ongoing upgrades. Operating capability: 3,380+ continuous hours. Source: https://www.asml.com/en/company/about-asml/cymer