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Inpria (JSR Inpria)
Inpria Corporation (Corvallis, Oregon; acquired by JSR Corporation in 2023 for approximately $514M) is the world's only commercial supplier of metal-oxide (tin-oxide-based) EUV photoresist — a fundamentally different chemistry from conventional chemically amplified resists (CAR). Inpria's tin-oxide resist offers higher EUV photon absorption, higher etch resistance, and thinner film potential than organic CAR resists, enabling higher resolution patterning for sub-2nm High-NA EUV nodes. JSR/Inpria is now the sole commercial supplier of metal-oxide EUV resist, having beaten all competitors to commercial scale. TSMC and Intel are both qualifying JSR/Inpria metal-oxide resist for their most advanced nodes. Inpria was founded in 2007 as a spin-out from Oregon State University's chemistry department.
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Concentration2023
JSR/Inpria (Corvallis, Oregon) holds a global monopoly on commercial metal-oxide EUV photoresist — a fundamentally distinct chemistry from conventional organic chemically amplified resists (CAR). Metal-oxide resists use tin-oxide nanoparticles instead of organic polymer chains, providing approximately 10x higher EUV photon absorption, higher etch resistance, and thinner viable film thickness. For ASML's High-NA EUV scanner (EXE:5000, $380M each, first delivered 2024 to IMEC) targeting sub-2nm logic nodes, metal-oxide resist is the only commercially available resist chemistry capable of meeting resolution and sensitivity requirements. JSR acquired Inpria in 2023 — making a government-owned Japanese entity the sole worldwide supplier of the resist chemistry required for the next decade's most advanced semiconductor manufacturing. No other company has achieved commercial-scale metal-oxide EUV resist. The consolidation of the world's only High-NA EUV resist source into a government-controlled Japanese company was executed within months of JSR's nationalization.
Inpria / JSR Corporation ↗